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SEMTech Solutions
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SEMTech Solutions
Used SEM sales, accessories & service -
Analytical Testing Services
Outsourced FE-SEM / EDS analysis -
STS-Elionix
Electron Beam Lithography Systems
SEMs Currently Available for Demonstration
LEO 1560 Field Emission SEM
Price available on request
The LEO 1560 is an ultra high performance field emission SEM featuring the Gemini column technology. Standard features include an 8” airlock, a fully motorized 6 axis eucentric stage, and an IR chamber scope. WinXP is available as an option, currently Win98.
| Type | Resolution | Sample | Options | |
| TFE | 3 nm @ 1 kV, 1 nm @ 20 kV | 8” max., 152 mm X,Y | EDS, BSE, Thermal printer | |
| CONTACT US FOR MORE INFO | ||||
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AMRAY 1845 Field Emission SEM
Price available on request
The AMRAY 1845 features a 3 axes stage motorization package (X, Y, and R) and an IR Chamberview System. This system has been upgraded to WinXP for digital image capture and networking.
| Type | Resolution | Sample | Options | |
| TFE | 3nm@1kV | 8" max 152mm, X, Y | EDS, BSE | |
| CONTACT US FOR MORE INFO | ||||
KLA-Tencor 4200/L SEM
Price available on request
The KLA 4200/L features a 5 axis eucentric stage and an 8” automated load lock to accommodate small sample pieces and full coverage of 8” wafers. Defect review software is standard, along with pattern recognition for wafer/mask alignment. This system recently was upgraded to WinXP; EDS and CD software, can be provided as options. 3 month warranty is included.
| Type | Resolution | Sample | Options | |
| TFE | 4 nm @ 1 kV 1.5 nm @ 15 kV | 8” max., 204 mm X,Y | WinXP upgrade | |
| CONTACT US FOR MORE INFO | ||||
Hitachi S-4200 Field Emission SEM
Price available on request
This Hitachi S-4200 FE-SEM is in excellent condition. The imaging capability is super, and the system has been refurbished with our X-Stream Imaging System, which allows for image capture and networking via a Windows XP platform.
| Type | Resolution | Sample | Options | |
| CFE | 5 nm @ 1 kV 1.6 nm @ 15 kV | 4” max., 100 mm X, 50 mm Y | EDS, BSE, IR Camera, Cold Finger, X-SIS | |
| CONTACT US FOR MORE INFO | ||||
AMRAY 1910 Field Emission SEM
Price available upon request
The AMRAY 1910 FE features a 3 axes stage motorization package (X, Y, and R), along with a 4” load lock for fast transfer of samples. Also, this system has been upgraded to WinXP for digital image capture and networking.
| Type | Resolution | Sample | Options | |
| TFE | 7 nm @ 1 kV 1.5 nm @ 30 kV | 4” max., 100 mm X/Y | 4” Load-lock, 3 axes motorized stage | |
| CONTACT US FOR MORE INFO | ||||
AMRAY 1830 SEM
Price available upon request
The AMRAY 1830 SEM features a large specimen chamber and many accessory ports for future expansion of analytical capabilities. The system has been upgraded to WinXP for digital image capture and networking.
| Type | Resolution | Sample | Options | |
| W (or LaB6) | 4 nm @ 30 kV | 4” max., 100 mm X/Y | BSE, IRCS, Cold Trap | |
| CONTACT US FOR MORE INFO | ||||
AMRAY 3200 SEM
Price available upon request
The AMRAY 3200 variable pressure SEM allows for uncompromised examination of conventionally unfriendly SEM samples. Standard features include a Robinson BSE, large chamber size, and computer controlled SEM package. Low vacuum specimen chamber pressure to 4 Torr, variable in 25 millitorr steps.
| Type | Resolution | Sample | Options | |
| LV HV W (or LaB6) | 6 nm @ 30 kV 4 nm @ 30 kV | 8” max., 100 mm X/Y | EDS, 3 axes motorized stage, IR Camera WinXP upgrade | |
| CONTACT US FOR MORE INFO | ||||
SEMs Currently being Refurbished
JEOL JSM-6340F SEM
Price available upon request
The JEOL JSM-6340F features an in-lens secondary electron detector capable of offering a resolution of 2.5 nm at 1kV. Also included is our X-Stream Imaging System, with WinXP for image capture and networking capability.
| Type | Resolution | Sample | Options | |
| CFE | 2.5 nm @ 1 kV 1.2 nm @ 20 kV | 4” max., 50 mm X 70 mm Y | X-SIS, 4” Airlock, Cold Trap | |
| CONTACT US FOR MORE INFO | ||||
AMRAY 3300 Field Emission SEM
Price available upon request
The AMRAY 3300 FE-SEM offers high resolution, high magnification imaging. This SEM has a large chamber and a 3 axes (X,Y, and R) motorized stage and has been upgraded to WinXP for digital image capture and networking.
| Type | Resolution | Sample | Options | |
| TFE | 5 nm @ 1.5 kV 1.5 nm @ 20 kV | 8” max., 100 mm X/Y | EDS, 3 axes motorized stage, WinXP upgrade | |
| CONTACT US FOR MORE INFO | ||||
AMRAY 1860 Field Emission SEM
Price available upon request
The AMRAY 1860 FE SEM features an 8” Auto Loadlock and Windows XP upgrade for digital image capture and networking. This system comes equipped with a 5 axes motorized stage and STS IR Chamber scope.
| Type | Resolution | Sample | Options | |
| TFE | 7 nm @ 1 kV 1.5 nm @ 25 kV | 8” max., 160 mm X 152 mm Y | IRCS, WinXP upgrade, 8” Loadlock | |
| CONTACT US FOR MORE INFO | ||||
JEOL JSM-6300F Field Emission SEM
Price available on request
The JEOL6300F SEM uses a field emission gun with cold cathode. The resolution is 1.5 nm in secondary electron imaging (SEI) and 3.0 nm in backscattered electron imaging (BEI) at 30 kV. The airlock specimen chamber allows up to a 32 mm diameter sample, and the size can also be up to 150 mm without the airlock.
| Type | Resolution | Sample | Options | |
| CFE | 1.5 nm @ 30 kV | 5” max., 50 mm X 70 mm Y | X-SIS | |
| CONTACT US FOR MORE INFO | ||||
JEOL JSM T-330 SEM
Price available upon request
The JEOL JSM T-330 is in excellent shape and can be used for a wide range of applications. X-SIS has just been added for digital image capture in addition to an IR Chamber Scope.
| Type | Resolution | Sample | Options | |
| W | 5 nm @ 30 kV | 5” max., 40 mm X 80 mm Y | X-SIS, IRCS | |
| CONTACT US FOR MORE INFO | ||||