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SEMTech Solutions
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SEMTech Solutions
Used SEM sales, accessories & service -
Analytical Testing Services
Outsourced FE-SEM / EDS analysis -
STS-Elionix
Electron Beam Lithography Systems
JEOL JSM-6300F Field Emission SEM
Price available on request
The JEOL6300F SEM uses a field emission gun with cold cathode. The resolution is 1.5 nm in secondary electron imaging (SEI) and 3.0 nm in backscattered electron imaging (BEI) at 30 kV. The airlock specimen chamber allows up to a 32 mm diameter sample, and the size can also be up to 150 mm without the airlock.
| Type | Resolution | Sample | Options | |
| CFE | 1.5 nm @ 30 kV | 5” max., 50 mm X 70 mm Y | X-SIS | |
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