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EBL Sample Holder for SEMs

EBL Sample Holder for SEMs

SEMTech Solutions has recently introduced an Electron Beam Lithography (EBL) sample holder for scanning electron microscopes (SEMs). The major benefit of this holder is that the Faraday cup and resolution standard (Au/C or Sn/C) is in the same focal plane as the sample, which maximizes EBL performance. This holder has been designed to interface with most SEMs that have a X,Y stage movement of +/- 25mm. This holder can accept sample sizes from 5mm to over 15mm, with a maximum thickness of 2mm.