The system was designed with staging, scan control and detector geometries optimized for sizing and measuring the composition of particles in the 0.5 micrometer to 100 micrometer range.
Down to sub-micron sized features
Secondary Electron Detection
Backscattered Electron Detection (Composition/Topographic modes)
* X-ray Microanalysis:
30 mm2 SDD capable of >20,000 cps on Cu at 1 nA
* Environmental (air/water/surface)
* Industrial Quality Control