The system was designed with staging, scan control and detector geometries optimized for sizing and measuring the composition of particles in the 0.5 micrometer to 100 micrometer range.
Specifications/Capabilities
* Imaging:
Down to sub-micron sized features
Secondary Electron Detection
Backscattered Electron Detection (Composition/Topographic modes)
* X-ray Microanalysis:
30 mm2 SDD capable of >20,000 cps on Cu at 1 nA
Standards-based quantification
Scientific Opportunities/Applications
* Environmental (air/water/surface)
* Industrial Quality Control
* Forensic