SEM Service, Repair & Preventive Maintenance
SEMTech Solutions provides SEM service, repair, preventive maintenance, and relocation for all major scanning electron microscope brands – Zeiss/LEO, JEOL, Hitachi, FEI/Philips, AMRAY, and others. Our nationwide team of factory-trained engineers operates from regional service centers across the Americas and Europe.
Unlike OEM providers, we service all brands and all generations, including instruments no longer supported by the original manufacturer.

Service for All SEM Brands: Including Legacy Systems
SEMTech Solutions services scanning electron microscopes from all major OEM platforms:
- Zeiss / LEO: Coverage for Zeiss EVO, LEO 1450, LEO 1530, Zeiss Supra, and related systems.
- JEOL: Coverage for JSM series and related instruments across all generations.
- Hitachi: Coverage for all Hitachi S-3000 and S-4000 series models, including field emission systems.
- FEI / Philips: Service for XL30, FEI Quanta series, and legacy Philips systems.
- AMRAY: Coverage for AMRAY 1830, 3200LV, 3300, and related instruments.
OEM manufacturers typically support their instruments for approximately seven years after the last sale date, then discontinue parts and service. For labs operating instruments beyond that window, SEMTech Solutions is one of the only independent providers with the parts inventory and engineering expertise to keep those systems running.

Full Coverage Service Plan for SEMs

The Full Coverage Service Agreement provides coverage for the tool, inclusive of vacuum pumps, internal circuit cards, power supplies, control modules, high-voltage components, vacuum components, and the electron optics. Further, the Agreement covers all labor and travel related expenses.
The Service Agreement also includes (2) Preventative Maintenances (PMs) as part of the coverage. Coverage applies across all major SEM brands, including legacy instruments no longer supported by OEM service channels are eligible.
- Key Benefits:
- The tool is maintained for optimum performance, with planned Preventative Maintenance procedures.
- Fixed-cost budgetary expense.
- Access to Regional & National Field Service Response Centers.
- No additional costs for covered parts.
- Remote diagnostic capability for faster issue identification
Per Diem Servicing on Scanning Electron Microscopes (SEMs)
Per diem services are offered as “on demand”, time & materials. Services are tailored per the individual instrument and current options/accessories package. Per-diem services are available for all major SEM brands regardless of instrument age or OEM support status.
We will provide a quotation for the tasks required, as well as insight into completely solving various problems encountered while onsite. We offer knowledgeable, dependable engineers for repairs and Preventative Maintenance (PM) procedures.
- Key Benefits:
- The tool is serviced & maintained as required.
- An estimated cost of repair/service can usually be predetermined prior to onsite visit.
- Expenses can be estimated and provided as part of the quotation.
- Service personnel will be dispatched from the regional service response center.

Scanning Electron Microscope (SEM) Preventative Maintenance
SEMTech Solutions PM Procedure is designed to include important checks and action-items that enhance performance and keep the SEM operating at peak levels. Our PMs consist of (3) major areas:
- Electron-Optical Column Service
- Electronics Service
- Vacuum Components Service
PM procedures are calibrated per instrument model and can be scheduled at 3 or 6 month intervals depending on throughput and application. Available for all major SEM platforms.
- Key Benefits:
- The PM is a comprehensive service program to ensure optimum performance of the tool.
- The service procedure can be scheduled in 3 or 6-month intervals depending on the throughput and application of the tool.
- The PM procedure can provide a means to detect possible issues at the earliest stage, and help to minimize costly downtime.
SEM Service Pricing
SEM service costs depend on instrument type, age, service tier, and configuration. As a general reference:
- Full Coverage Service Agreements are priced based on instrument model, accessories, and contract term. They cover all labor, travel, and parts for covered components — providing a predictable fixed annual cost. Contact us for a quote specific to your system.
- Per-Diem service is billed on time and materials. An estimated cost of repair or maintenance can typically be provided before the onsite visit.
- Preventive Maintenance visits are priced per visit based on instrument model and location. Scheduling 3- or 6-month intervals through a service contract reduces per-visit cost compared to standalone bookings.
For labs operating multiple instruments, multi-system service agreements are available at consolidated pricing.

Frequently Asked Questions
What SEM service programs does SEMTech Solutions offer?
Three tiers are available: (1) a fixed-price Full-Coverage Service Agreement, (2) on-demand Per-Diem service, and (3) scheduled Preventative-Maintenance (PM) visits—together covering every need from routine upkeep to emergency repair.
What is included in a Full-Coverage Service Agreement?
The agreement covers the entire SEM—including vacuum pumps, power supplies, circuit cards, control modules, high-voltage and vacuum components—plus all labour, travel and two PM visits each year, giving you a predictable, fixed-cost budget.
When should I choose Per-Diem service?
Per-Diem service is a time-and-materials option for one-off repairs or maintenance. You receive a quotation up-front, estimated expenses and a visit from a regional field-service engineer who tailors the work to your specific instrument.
What does the Preventative-Maintenance procedure cover?
Each PM visit addresses three critical areas—electron-optical column, electronics and vacuum components—checking and calibrating performance every 3 or 6 months to catch issues early and minimise downtime.
Does SEMTech Solutions service SEM brands other than their own?
Yes. SEMTech Solutions services all major SEM brands; JEOL, Hitachi, Zeiss/LEO, FEI/Philips, AMRAY, and others, regardless of purchase source. We are an independent service provider, not an OEM channel, which means we can support instruments that the original manufacturer no longer services. This includes legacy systems that have been discontinued or dropped from OEM service programs.
Why trust SEMTech Solutions with my SEM?
A nationwide team of experienced, factory-trained engineers services all major SEM brands, backed by a large parts inventory and 20+ years of proven expertise—ensuring prompt response and optimal system performance.
Can SEMTech Solutions help with moving or relocating a SEM?
Yes. Our engineers use best practices to stabilize the electron optics column, vacuum system, stage, and electronics chassis — covering everything from deinstallation at your current site to recommissioning at the destination.